Method and apparatus for coating surfaces
US8293017B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2008 |
| Grant date | Oct 23, 2012 |
| Priority date | — |
| Expiry date | Aug 4, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/542
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus includes a workpiece support, a source for emitting a plume of coating material that flows toward the workpiece support, and plume influencing structure between the source and the workpiece support. The plume influencing structure includes a shield with plural openings extending therethrough approximately parallel to a general direction of flow of the plume away from the source. According to a different aspect, a method includes emitting from a source a plume of coating material that flows toward a workpiece support, and adjusting the flow of the plume with a shield between the source and the workpiece support, the shield having plural openings extending therethrough approximately parallel to a general direction of flow of the plume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.