Thin metal film conductors and their manufacture

US8293323B2 · kind B2 · utility

Assignee

• The Penn State Research Foundation · US

Inventors

• Susan Trolier McKinstry · State College, US
• Clive A. Randall · State College, US
• Song-Won Ko · State College, US
• Michael S. Randall · Simpsonville, US

Key dates

• Filing date: Feb 23, 2007
• Grant date: Oct 23, 2012
• Expiry date: Aug 30, 2030

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C18/08
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Metal solutions such as copper and nickel suitable for chemical solution deposition (CSD) are disclosed, and their manufacture into low resistivity thin metal films is disclosed. The films may be thermal processed at relatively low temperatures and may be co-fired with ultra low fire high K ceramic dielectrics.