Matrix-type cold-cathode electron source device
US8294351B2 · kind B2 · utility
1Cited by
4References
16Claims
0Family size
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Key dates
| Filing date | Feb 19, 2009 |
| Grant date | Oct 23, 2012 |
| Priority date | — |
| Expiry date | Apr 16, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2329/4643
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A matrix-type cold-cathode electron source device includes a mesh structure (8) on which through-holes (9) are formed and drive portions (7a, 7b). The through-hole (9) has an opening diameter of 1/N or less of the alignment pitch of electron source elements (4) and the drive portions (7a, 7b) drive the mesh structure (8) every 1/N of the alignment pitch of the electron source elements (4). Thus it is possible to increase a resolution without reducing the size of an electron source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.