Micro-machined accelerometer
US8297121B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 8, 2009 |
| Grant date | Oct 30, 2012 |
| Priority date | — |
| Expiry date | May 8, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P1/006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined accelerometer in a flat plate includes a base and at least two resonator measuring cells provided with a common mobile seismic element, the two measuring cells being placed one on each side of the common mobile seismic element along the sensitive axis of the accelerometer, such that under the effect of an acceleration, the resonator of one measuring cell undergoes a traction while the resonator of the other measuring cell undergoes a compression, the measuring cells respectively configured to amplify the acceleration force generating the translation of the common mobile seismic element provided with a respective anchoring foot-piece. The common mobile seismic element includes at least two mobile seismic masses able to be displaced in translation along the sensitive axis of the accelerometer and/or in rotation with respect to a respective axis of rotation substantially orthogonal to the sensitive axis under the effect of an acceleration along the sensitive axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.