Pressure sensor

US8297133B2 · kind B2 · utility

Assignees

• S.W.A.C. Schmitt-Walter Automation Consult GmbH · DE
• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Stefan Schmitt-Walter · Dietenhofen, DE
• Lutz Seffner · Dresden, DE
• Thomas Roedig · Dresden, DE
• Sylvia Gebhardt · Dresden, DE
• Bent Brueckner · Dresden, DE
• Andreas Schoenecker · Freital, DE

Key dates

• Filing date: Jun 20, 2005
• Grant date: Oct 30, 2012
• Expiry date: Jun 27, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L1/16
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor has a multiplicity of piezoelectric converter elements which are arranged such that they are essentially parallel to a force-applying or pressure-applying direction. The converter elements can be arranged at a distance from one another by an insulating material and/or are at least partially embedded in the material.A support material having greater mechanical rigidity than the converter elements, in particular in the force-applying or pressure-applying direction, is assigned to at least a number of piezoelectric converter elements, or the piezoelectric converter element is applied, in the form of a layer, to a supporting body made from this support material and is electrically contact-connected, for example, by a bottom electrode, which is arranged between the converter element layer and the supporting body, and a cover electrode which is applied to an outer side of the converter element layer.