Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers
US8298614B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 4, 2010 |
| Grant date | Oct 30, 2012 |
| Priority date | — |
| Expiry date | Dec 25, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31667
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An improved vapor-phase deposition method and apparatus for the application of multilayered films/coatings on substrates is described. The method is used to deposit multilayered coatings where the thickness of an oxide-based layer in direct contact with a substrate is controlled as a function of the chemical composition of the substrate, whereby a subsequently deposited layer bonds better to the oxide-based layer. The improved method is used to deposit multilayered coatings where an oxide-based layer is deposited directly over a substrate and a SAM organic-based layer is directly deposited over the oxide-based layer. Typically a series of alternating layers of oxide-based layer and organic-based layer are applied.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.