Fabrication of vertically aligned metallic nanopillars
US8299341B2 · kind B2 · utility
2Cited by
6References
14Claims
0Family size
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Key dates
| Filing date | May 13, 2010 |
| Grant date | Oct 30, 2012 |
| Priority date | — |
| Expiry date | Jul 28, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2975
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Solid and hollow cylindrical nanopillars with nanoscale diameters are provided. Also provides is a method of making such nanopillars using electron beam lithography followed by the electroplating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.