Microstructure with reactive bonding

US8299630B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• Technische Universität Chemnitz · DE

Inventors

• Joerg Braeuer · Nehren, DE
• Thomas Gessner · Plymouth, US
• Lutz Hofmann · Wickede (Ruhr), DE
• Joerg Froemel · Sendai, JP
• Maik Wiemer · Limbach-Oberfrohna, DE
• Holger Letsch · Östringen, DE
• Mario Baum · Scharfenstein, DE

Key dates

• Filing date: Jan 26, 2010
• Grant date: Oct 30, 2012
• Expiry date: Jan 26, 2030

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/032
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A microstructure has at least one bonding substrate and a reactive multilayer system. The reactive multilayer system has at least one surface layer of the bonding substrate with vertically oriented nanostructures spaced apart from one another. Regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A method for producing at least one bonding substrate and a reactive multilayer system, includes, for forming the reactive multilayer system, at least one surface layer of the bonding substrate is patterned or deposited in patterned fashion with the formation of vertically oriented nanostructures spaced apart from one another, and regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A microsystem is formed from two bonding substrates and a construction lying between the bonding substrates, the construction having a reacted reactive layer system. The microsystem is a sensor coated with biomaterial and/or has elements composed of polymeric material and/or at least one magnetic and/or piez…