Optical projection system

US8300210B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Johannes Rau · Gerstetten, DE
• Armin Schoeppach · Aalen, DE
• Bernhard Gellrich · Aalen, DE
• Jens Kugler · Heubach, DE
• Martin Mahlmann · Heidenheim, DE
• Bernhard Geuppert · Lauchheim, DE
• Thomas Petasch · Aalen, DE
• Gerhard Fuerter · Ellwangen, DE

Key dates

• Filing date: Oct 1, 2005
• Grant date: Oct 30, 2012
• Expiry date: May 5, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70883
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical projection unit comprising a first optical element module and at least one second optical element module is provided. The first optical element module comprises a first housing unit and at least a first optical element, the first optical element being received within the first housing unit and having an optically used first region defining a first optical axis. The at least one second optical element module is located adjacent to the first optical element module and comprises at least one second optical element, the second optical element defining a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is at least one of laterally offset and inclined with respect to the first housing axis. Furthermore, the first housing axis is substantially collinear with the second optical axis.