Pressure sensor system
US8302484B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 15, 2010 |
| Grant date | Nov 6, 2012 |
| Priority date | — |
| Expiry date | May 6, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0038
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure connection concept for pressure sensor modules is provided, using which the influence of assembly-related stresses in the sensor system on the sensor diaphragm and accordingly on the measuring signal detection is kept very low. The sensor system includes a sensor module for pressure detection and a connecting piece and at least one seal for coupling the sensor module to a measuring system. The sensor module includes at least one sensor element having a diaphragm and means for signal detection. Together with the means for signal detection, the sensor element is provided with packaging having a pressure connection opening and electrical contacts. A pressure channel is provided in the connecting piece, the pressure channel being coupled to the pressure connection opening of the sensor module using the seal. The packaging of the sensor module includes a tube-shaped projection which forms the pressure connection opening, and the pressure channel of the connecting piece terminates in a connecting tube. The tube-shaped projection of the sensor module and the connecting tube of the connecting piece fit into each other, and the seal designed as a radial seal is situated between t…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.