Specimen holder having alignment marks

US8304745B2 · kind B2 · utility

Assignees

• Carl Zeiss Micromanaging GmbH · DE
• Carl Zeiss AG · DE
• Carl Zeiss NTS GmbH · US

Inventors

• Heino Heise · Dransfeld, DE
• Andreas Nolte · Kirchlinteln, DE
• Christian Thomas · Walldorf, DE
• Martin Edelmann · Aalen, DE
• Uwe Wolf · Magdala, DE
• Ulrich Kohlhaas · Oettingen, DE
• Dmitry Lysenkov · Oberkochen, DE

Key dates

• Filing date: May 31, 2011
• Grant date: Nov 6, 2012
• Expiry date: Jun 24, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/34
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

For the microscopy of an object or a specimen with a combination of optical microscopy and particle beam microscopy, an electrically conducting specimen carrier (1) is used which is configured for use in a particle beam microscope as well as in an optical microscope and has at least one alignment mark (2). The alignment mark is configured as a pass-through structure and is detectable from the top and from the bottom of the specimen carrier.