Pressure measuring device

US8304844B2 · kind B2 · utility

Assignee

• ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

• Igor Getman · Lörrach, DE
• Dieter Stolze · Potsdam, DE
• Anh Tuan Tham · Berlin, DE

Key dates

• Filing date: Nov 7, 2008
• Grant date: Nov 6, 2012
• Expiry date: Sep 16, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/147
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure measuring device having a pedestal, an intermediate piece of semiconductor arranged on the pedestal and, connected with the pedestal and arranged on the intermediate piece and connected with the intermediate piece, a semiconductor pressure sensor having a support and a measuring membrane, or diaphragm. The pressure measuring device offers reliable protection of the sensitive measuring membrane, or diaphragm, against mechanical distortions. Provided extending in the interior of the intermediate piece is an annular cavity, which surrounds a first cylindrical section and, pedestal end thereof, a second cylindrical section of the intermediate piece. The second cylindrical section has a greater outer diameter than the first cylindrical section. The cavity is open on an end of the intermediate piece toward the pedestal. The second cylindrical section has an end face facing the pedestal and lying on an end face of the pedestal, for forming a connecting area, via which the intermediate piece is mechanically connected with the pedestal.