MOEMS apparatus and a method for manufacturing same
US8305670B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 2009 |
| Grant date | Nov 6, 2012 |
| Priority date | — |
| Expiry date | May 24, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/008
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MOEMS apparatus for scanning an optical beam is formed from a double active layer silicon on insulator (DSOI) substrate that includes two active layers separated by an insulating layer. The apparatus includes an electro-static comb drive having a stator formed in a first of the two active layers and a rotor formed in a second of the two active layers. The electro-static comb drive is operative to impart a tilting motion to a micro-mirror formed in the second active layer. The MOEMS apparatus is designed such that: a) at least one of the distances created between a tooth belonging to the rotor and an adjacent tooth belonging to the stator is less than 7 μm; and the aspect ratio of the apparatus is higher than 1:20.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.