Method for operating a sensor system, and sensor system
US8307707B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 19, 2009 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Jun 11, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a method for operating a sensor system including a substrate having a main plane of extension and an oscillating structure which is movable relative to the substrate, drive elements excite the oscillating structure to a torsional oscillation about an axis of oscillation running essentially perpendicular to the main plane of extension, first detection elements detect a first tilting movement of the oscillating structure about a first tilting axis essentially parallel to the main plane of extension, and further detection elements detect an angular acceleration of the substrate superposed to the torsional oscillation essentially about the axis of oscillation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.