Translational mass in-plane MEMS accelerometer
US8307710B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2009 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Feb 26, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0882
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane. The device also includes a substrate, a proof mass, a hinge element that flexibly connects the proof mass to the substrate, the major plane corresponds to a major surface of the proof mass, a plurality of conductive leads located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive leads, and a plurality of anchor pads connected to the substrate and one of the conductive springs. Isolation trenches directly connect to outer edges of the leads that are adjacent to other leads or proof mass material. The leads and springs include a plurality of slots.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.