Plasma booster for plasma treatment installation
US8307783B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 2, 2010 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Sep 2, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32018
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Vacuum treatment installation particularly for plasma coating workpieces, has an arrangement for boosting and/or igniting a glow discharge plasma for the treatment of workpieces, and at least one hollow body of electrically conductive material, the hollow body including a hollow space and at least one entrance opening through which charge carriers flow in order to make possible ignition and operation of a plasma or to boost an existing plasma. The hollow body is electrically connected to workpieces so that the hollow body is essentially at workpiece potential. The hollow space is formed such that when an electric signal is applied to the hollow body, at least in a certain pressure and voltage range, geometric conditions for the ignition of a discharge in the interior of the hollow body are satisfied, and the at least one hollow body is not a workpiece carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.