Dual chamber valveless MEMS micropump
US8308452B2 · kind B2 · utility
61Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 11, 2006 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Dec 11, 2027 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B43/046
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A valveless MEMS micropump capable of improved efficiency and performance is disclosed. The micropump includes two adjoining chambers separated by a piezoelectric actuated pump membrane. The micropump moves fluid through the chambers through diffuser elements characterized by differential directional resistance to fluid flow by piezoelectric actuation of the pump membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.