Device for characterizing the electro-optical performance of a semiconductor component
US8310266B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2010 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Dec 20, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2865
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for characterizing the electro-optical performance of a semiconductor component includes a chamber containing a controlled atmosphere; a measuring head equipped with conductive probes for contacting the electrical interfaces of said component and connected to a data processing system in order to determine said electro-optical performance; and a staging fixture support to accommodate said component(s), the staging fixture being capable of being cooled and being moved in an upward and downward translational movement to bring the electrical interfaces of said component(s) into contact with the tip of the measuring probes of the measuring head. The staging fixture has bumps and the components are positioned in contact with these and the staging fixture accommodates, in the area of each of these bumps, two positioning grids which are capable of sliding relative to each other and cooperating with each other to define pockets suitable for accommodating the component(s) to be characterized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.