Spectroscopic imaging method and system for exploring the surface of a sample
US8310669B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2008 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Jul 25, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/656
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectroscopic imaging system includes a microscopic or macroscopic device including an objective, a housing including a spectroscope, and scanning means disposed between the objective and the spectroscope. During the scanning of the excitation beam on a scanned area on the sample surface, the energy of the emitted light beam is integrated on the pixels of the detection means, generating average spectral data for each line of pixels. Storage means are connected to the detection means, including a memory able to store average spectral data of M lines of pixels. An imaging device is connected to the storage means, and the average spectral data of M lines of pixels are sent simultaneously toward the imaging device in order to obtain an average spectroscopic image of the scanned area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.