Multifunctional scanning probe microscope
US8312560B2 · kind B2 · utility
0Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2010 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Feb 12, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a multifunctional scanning probe microscope comprising: According to the invention, it comprises first and second guides (10, 11) fastened to the platform (9), the analyzer comprises a second measuring head (16) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6), and the first (13) and second (16) measuring heads, are movably mounted on the first (10) and second (11) guides respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.