Patent · US Active

Electrostatic modulation of surface roughness

US8313839B2 · kind B2 · utility

0Cited by
1References
15Claims
0Family size

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Inventors

Key dates

Filing dateSep 19, 2004
Grant dateNov 20, 2012
Priority date
Expiry dateMay 22, 2028

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/31707
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method for modulating roughness of a surface, comprising: providing a first pre-stressed electrically conductive layer (10) coupled to a dielectric elastic foundation (20) provided over a second conductive layer (30); and subjecting the two conductive layers to a voltage difference, thereby modulating the roughness of the first surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.