Electrostatic modulation of surface roughness
US8313839B2 · kind B2 · utility
0Cited by
1References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2004 |
| Grant date | Nov 20, 2012 |
| Priority date | — |
| Expiry date | May 22, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31707
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for modulating roughness of a surface, comprising: providing a first pre-stressed electrically conductive layer (10) coupled to a dielectric elastic foundation (20) provided over a second conductive layer (30); and subjecting the two conductive layers to a voltage difference, thereby modulating the roughness of the first surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.