Patent · US Active

Nano electromechanical integrated-circuit filter

US8314665B2 · kind B2 · utility

2Cited by

24References

19Claims

0Family size

Assignee

TRUSTEES OF BOSTON UNIVERSITY · US

Inventors

Pritiraj Mohanty · Beverly Hills, US
Robert L. Badzey · Quincy, US
Alexei Gaidarzhy · Watertown, US

Key dates

Filing date	Sep 20, 2007
Grant date	Nov 20, 2012
Priority date	—
Expiry date	Mar 30, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH03H9/485
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the sub-micron elements.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.