Patent · US Active

Method for carrying out a self-test for a micromechanical sensor device, and corresponding micromechanical sensor device

US8316688B2 · kind B2 · utility

1Cited by

2References

10Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Stefan Kimmerle · Neuffen, DE
Michael Baus · Bietigheim-Bissingen, DE

Key dates

Filing date	Sep 1, 2010
Grant date	Nov 27, 2012
Priority date	—
Expiry date	Feb 2, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01D2218/10
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for carrying out a self-test for a micromechanical sensor device, and a corresponding micromechanical sensor device. The method has the following steps: exciting the sensor device using a first excitation signal variation in a first self-test; storing a corresponding first response signal variation of the sensor device; exciting the sensor device using a second excitation signal variation in a second self-test; storing a corresponding second response signal variation of the sensor device; analyzing the first and second response signal variations with regard to at least one predefined criterion; and preparing a self-test result based on the analytical result of the first and second response signal variations.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.