Patent · US Active

Force sensor

US8316725B2 · kind B2 · utility

47Cited by
32References
22Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 15, 2010
Grant dateNov 27, 2012
Priority date
Expiry dateJan 28, 2031

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49007
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A force sensor is disclosed. In one illustrative embodiment, the force sensor may include a sensing die mounted to a substrate and an actuation assembly for transmitting an external force to the sensing die. The sensing die may include a diaphragm and one or more sensing elements (e.g. piezoresistive elements) positioned on the diaphragm. The actuation assembly may include a spherical member or object (e.g. ball bearing) in contact with the diaphragm, a pin member having a first end coupled to the spherical object and a second end coupled to a button member. The actuator assembly may transmit a force applied to the button member to the diaphragm via the pin member and spherical member. In some cases, the front side of the sensing die may be mounted to the substrate with an adhesive, such as a pattern of conductive adhesive and nonconductive adhesive to electrically connect one or more bond pads of the sensing die to one or more bond pads of the substrate without the need for wire bonds. The force sensor may also include signal conditioning circuitry.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.