Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus
US8318074B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2009 |
| Grant date | Nov 27, 2012 |
| Priority date | — |
| Expiry date | May 31, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/682
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A transfer apparatus includes a table on which a molding material is placed, a mold holding body that fixes and holds a mold disposed such as to be opposed to a surface of the table, a gimbal member which holds the mold holding body and which forms a convex spherical surface portion, a gimbal member formed with a concave spherical surface portion which is opposed and in contact with the convex spherical surface portion, a movable body that holds the gimbal member and which can advance and retreat in the vertical direction with respect to the table surface, and an attitude adjusting/holding unit that adjusts and holds attitude of the gimbal member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.