Substrate analysis systems
US8318094B1 · kind B1 · utility
63Cited by
12References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 16, 2011 |
| Grant date | Nov 27, 2012 |
| Priority date | — |
| Expiry date | Jun 16, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/11
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention provides systems for analyzing substrates. Also provided by the invention are improved optical systems for enhanced multiplex illumination, optical systems with compact multi-wavelength illumination architectures, optical systems for enhanced detection of optical signals, and optical systems for reduced autofluorescence background noise.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.