Patent · US Active

Substrate analysis systems

US8318094B1 · kind B1 · utility

63Cited by
12References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 16, 2011
Grant dateNov 27, 2012
Priority date
Expiry dateJun 16, 2031

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T436/11
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

This invention provides systems for analyzing substrates. Also provided by the invention are improved optical systems for enhanced multiplex illumination, optical systems with compact multi-wavelength illumination architectures, optical systems for enhanced detection of optical signals, and optical systems for reduced autofluorescence background noise.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.