Sensor apparatus and method therefor
US8322192B2 · kind B2 · utility
0Cited by
19References
25Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 22, 2010 |
| Grant date | Dec 4, 2012 |
| Priority date | — |
| Expiry date | Oct 24, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor apparatus includes a metal oxide semiconductor sensor and a housing having an internal chamber in which the sensor is disposed. The housing includes at least one window for the ingress of a gas into the internal chamber from an atmosphere exterior to the housing. A gas-selective barrier is disposed across the at least one window.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.