Patent · US Active

Sensor package assembly having an unconstrained sense die

US8322225B2 · kind B2 · utility

6Cited by
45References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 2010
Grant dateDec 4, 2012
Priority date
Expiry dateJun 4, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/15151
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A pressure detection mechanism having a pressure sense die which may be attached directly to a surface of an alumina-based substrate with an adhesive having an optimum thickness. The adhesive may be stress compliant and may be one or more of silicone, silicone-epoxy, epoxy or any other suitable adhesive material. A compensation and interface application specific integrated circuit may be attached to the surface of the package substrate. The pressure sense die may be electrically connected to the integrated circuit with bond wires. The integrated circuit may be electrically connected to trace conductors on the package substrate with bond wires, and trace conductors may be connected to stress compliant metal conductors or leads for external connection to a mounting surface such as a printed circuit board. Hard plastic, or like material, symmetric covers, with one or more pressure ports or vents, may be attached to both sides of the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.