Through-the-lens illuminator for optical comparator
US8322888B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2012 |
| Grant date | Dec 4, 2012 |
| Priority date | — |
| Expiry date | Jun 25, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/10
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination system shares portions of an objective of an optical inspection system. A plurality of beam-shaping optics collects light from a plurality of effective light sources and directs the light through a portion of the objective for illuminating an object under inspection. The objective includes a front relay lens, a rear relay lens, and an objective stop disposed between the front and rear relay lenses for collecting light scattered from the object and forming an image of the object with the collected light. The beam-shaping optics, which surround the objective stop, are arranged together with the associated effective light sources for non-uniformly distributing light within a range of angles required for illuminating the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.