Patent · US Active

Multi-layer micro structure for sensing substance

US8323580B2 · kind B2 · utility

6Cited by

5References

20Claims

0Family size

Assignee

OptoTrace (SuZhou) Technologies, Inc. · CN

Inventors

Hong Wang · Shanghai, CN
Zhimin Liu · Chengdu, CN

Key dates

Filing date	Feb 18, 2011
Grant date	Dec 4, 2012
Priority date	—
Expiry date	May 24, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/658
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micro structure for sensing a substance using light scattering includes a substrate, a first layer on the substrate, wherein the first layer comprises a metallic material, a second layer over the first layer, and a mask layer over the second layer. A plurality of nano holes are formed through the mask layer and the second layer, wherein the plurality of holes are defined in part by internal surfaces on the second layer and the mask layer. Two or more structure layers are formed on the mask layer and the internal surfaces in the plurality of holes. The two or more structure layers comprise different material compositions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.