Optical functional element, optical functional element array, exposure device, and method of manufacturing optical functional element
US8324644B2 · kind B2 · utility
0Cited by
2References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2010 |
| Grant date | Dec 4, 2012 |
| Priority date | — |
| Expiry date | Mar 18, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/814
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
According to an aspect of the invention, an optical functional element includes a substrate, a semiconductor element portion, and a light emitting element portion. The semiconductor element portion includes a first part of a semiconductor multi layer structure formed on the substrate. The light emitting element portion includes a second part of the semiconductor multi layer structure and light emitting element structure formed on the second part of the semiconductor multi layer structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.