Micromachined transducers and method of fabrication
US8329053B2 · kind B2 · utility
56Cited by
14References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 23, 2009 |
| Grant date | Dec 11, 2012 |
| Priority date | — |
| Expiry date | Jan 12, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/704
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In accordance with an illustrative embodiment, a method of fabricating a transducer is described. The method comprises providing a transducer over a first surface of a substrate, wherein the substrate comprises a thickness. The method further comprises patterning a mask over a second surface. The mask comprises an opening for forming a scribe etch. The method comprises etching through the opening in the mask and into but not through the thickness of the substrate to provide the scribe etch.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.