Solid-state array for lithography illumination
US8330938B2 · kind B2 · utility
1Cited by
14References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2009 |
| Grant date | Dec 11, 2012 |
| Priority date | — |
| Expiry date | Apr 21, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70075
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for providing an actinic illumination energizes solid-state light sources in an array, wherein each solid-state light source emits actinic light of a predetermined wavelength, directs the emitted actinic light from the solid state light sources through one or more compound parabolic concentrators, and forms a field conjugate to an objective lens by directing the concentrated actinic light from each compound parabolic concentrator through one or more lens elements in a lens array. Emission of one or more of the solid state light sources is adjusted to obtain a predetermined illumination pupil envelope function.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.