Optical method for precise three-dimensional position measurement
US8330963B2 · kind B2 · utility
1Cited by
20References
9Claims
0Family size
Inventors
Key dates
| Filing date | Oct 10, 2011 |
| Grant date | Dec 11, 2012 |
| Priority date | — |
| Expiry date | Oct 10, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
We disclose a method for accurate three-dimensional position measurement in the field of nano-positioning using a single light beam and principles of interferometry to measure position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.