Patent · US Active

Device for scanning a sample surface covered with a liquid

US8332960B2 · kind B2 · utility

2Cited by

13References

21Claims

0Family size

Assignee

WESTFÄLISCHE WILHELMS-UNIVERSITÄT MÜNSTER · DE

Inventors

Tilman Schäffer · Lompoc, US
Matthias Böcker · Erlangen, DE
Boris Anczykowski · Hachenburg, DE

Key dates

Filing date	Sep 14, 2007
Grant date	Dec 11, 2012
Priority date	—
Expiry date	Jun 10, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01Q60/44
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A device for scanning the surface of a sample which is covered with a liquid, comprising a probe which has a tip at one end, means for moving the probe and the sample relative to one another a light source focussing device which focuses light from the light source onto a location in the area of the tip located in the liquid and a detector for detecting light which was scattered by the tip, wherein a boundary surface at which the light enters the liquid is located on the light path between the light source and the tip, wherein the boundary surface is positionally fixed with respect to the probe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.