Silicon contactor including plate type powders for testing semiconductor device
US8334595B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 7, 2009 |
| Grant date | Dec 18, 2012 |
| Priority date | — |
| Expiry date | Apr 7, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/16225
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A silicon contactor of which a side contacts test terminals of a semiconductor testing device and of which an other side contacts ball leads of a semiconductor device so as to be used in the semiconductor testing device, including: conductive silicon parts which are formed opposite to the ball leads and/or the test terminals and include silicon rubber and conductive powders; and an insulating silicon part which is formed by filling silicon rubber among areas of the conductive silicon parts, which do not contact the ball leads, and supports the conductive silicon parts, wherein the conductive powders of the conductive silicon parts include plate type powders. Therefore, the plate type powders are used as the conductive powders of the conductive silicon parts to improve contact characteristics between the conductive silicon parts and the semiconductor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.