Micromechanical resonator
US8334736B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 28, 2011 |
| Grant date | Dec 18, 2012 |
| Priority date | — |
| Expiry date | Oct 28, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02299
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator including a movable mass structure and a spring structure. The spring structure includes a spring element. The spring element is anchored from one end and connected to a plurality of electrode fingers on another end. The plurality of electrode fingers are operatively connected together at the other end of the spring element. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.