Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers
US8334984B2 · kind B2 · utility
17Cited by
3References
11Claims
0Family size
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Key dates
| Filing date | Aug 21, 2009 |
| Grant date | Dec 18, 2012 |
| Priority date | — |
| Expiry date | Apr 21, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/0802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A plurality of Fabry-Perot interferometric sensors are optically coupled in series with each other to form an ordered optical series. Each Fabry-Perot interferometric sensor has a unique signalband and a passband. Each Fabry-Perot interferometric sensor has its unique signalband within the passbands of all of the next higher ordered Fabry-Perot interferometric sensors in the optical series so that a corresponding unique fringe signal from each of the Fabry-Perot interferometric sensors is a multiplexed output from the optical series.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.