Patent · US Active

Apparatus and method for thermal management using vapor chamber

US8335083B2 · kind B2 · utility

8Cited by
40References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 21, 2010
Grant dateDec 18, 2012
Priority date
Expiry dateOct 21, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldThermal processes and apparatus
  • WIPO sectorMechanical engineering

Abstract

An apparatus includes a plurality of islands each carrying multiple cantilevers. The apparatus also includes a fluidic network having a plurality of channels separating the islands. The channels are configured to provide fluid to the islands, and the fluid at least partially fills spaces between the cantilevers and the islands. Heat from the islands vaporizes the fluid filling the spaces between the cantilevers and the islands to transfer the heat away from the islands while driving the cantilevers into oscillation. The apparatus may also include a casing configured to surround the islands and the fluidic network to create a vapor chamber, where the vapor chamber is configured to retain the vaporized fluid. The islands and the fluidic network could be formed in a single substrate, or the islands could be separate and attached together by a binder located within the channels of the fluidic network.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.