Master disk exposing apparatus and the adjusting method therefor
US8335146B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 22, 2007 |
| Grant date | Dec 18, 2012 |
| Priority date | — |
| Expiry date | Jan 27, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3045
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A master disk exposing apparatus having: a turntable for rotating a master disk; moving means for horizontally moving the turntable in at least one direction; beam irradiating means for irradiating an electron beam toward the turntable, thereby forming a beam spot onto the turntable or the master disk; beam deflecting means for deflecting the beam; and control means for controlling the moving means, the beam irradiating means, and the beam deflecting means, wherein the control means includes initializing means for executing an initial operation to drive at least either the moving means or the beam deflecting means and make an origin of the beam spot coincide with a rotational center of the turntable at the time of activation. An apparatus and a method for easily adjusting a deviation between an origin of an irradiating position of the recording beam and the rotational center of the turntable are, thus, provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.