Method of collective fabrication of calibration-free temperature and/or strain sensors by matching of resonators on the basis of resonant frequency and static capacitance criteria
US8336192B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2010 |
| Grant date | Dec 25, 2012 |
| Priority date | — |
| Expiry date | Feb 13, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of collective fabrication of remotely interrogatable sensors, wherein the method may include fabricating fabricating a first series of first resonators exhibiting a first resonant frequency at ambient temperature and a first static capacitance and fabricating a second series of second resonators exhibiting a second resonant frequency at ambient temperature and a second static capacitance. The method may also include performing a series of electrical measurements of the set of the first series of first resonators and of the set of the second series of second resonators, so as to determine first pairs and second pairs of resonant frequency and of capacitance of each of the first and second resonators and performing a series of matching of a first resonator and of a second resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.