Cryopump and method for diagnosing the cryopump
US8336318B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 13, 2009 |
| Grant date | Dec 25, 2012 |
| Priority date | — |
| Expiry date | Apr 30, 2031 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B37/08
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A cryopump is provided with: a refrigerator that generates a cold state by a heat cycle in which an operating gas inhaled inside is expanded and discharged; a heat shield thermally connected to the refrigerator so as to be cooled to a target temperature; and a control unit that determines a command value for a heat cycle frequency such that a temperature of the heat shield follows the target temperature, and provides the command value to the refrigerator. The control unit estimates whether the refrigerator outputs a refrigerating capacity corresponding to the command value for the frequency based on a flow rate of the operating gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.