Sensor with micromechanical construction
US8336395B2 · kind B2 · utility
1Cited by
13References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2009 |
| Grant date | Dec 25, 2012 |
| Priority date | — |
| Expiry date | Jan 28, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/8427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Measuring transducer of the vibration type for measuring a mass flow of a flowing medium. The measuring transducer includes two straight measuring tubes for conveying the medium, wherein the measuring tubes are arranged in parallel to one another and the measuring transducer is embodied with micromechanical construction. The measuring transducer of the vibration type of the invention permits reliable measurement of the smallest mass flows of a flowing medium in the form of, for example, a liquid or a gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.