Patent · US Active

Endblock for a magnetron device with a rotatable target

US8337681B2 · kind B2 · utility

1Cited by

2References

8Claims

0Family size

Assignee

VON ARDENNE Anlagentechnik GmbH · DE

Inventors

Hans-Juergen Heinrich · Ennepetal, DE
Ulf Seyfert · Dresden, DE
Goetz Teschner · Gelnhausen, DE

Key dates

Filing date	Nov 18, 2009
Grant date	Dec 25, 2012
Priority date	—
Expiry date	Sep 2, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3444
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

To achieve an improved end block, in which heating by induction eddy currents, which may occur during AC sputtering, for example, is significantly reduced relative to known end blocks, an end block for a magnetron configuration having a rotating target comprises an end block housing having an attachment surface for attaching the end block on a support apparatus, a pivot bearing for rotatable mounting of the rotating target, and at least one current conduction apparatus which conducts current through the end block housing in operation of the end block. The end block housing is implemented so that each current path in the end block housing which encloses the current conduction apparatus has an interruption at least one point.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.