Patent · US Active

Method for forming a catalyst suitable for growth of carbon nanotubes

US8338296B2 · kind B2 · utility

2Cited by

18References

17Claims

0Family size

Assignees

IMEC · BE
Katholieke Universiteit Leuven, KU LEUVEN R&D · BE

Inventors

Hari Pathangi Sriraman · Leuven, BE
Ann Witvrouw · Herent, BE
Philippe M. Vereecken · Liège, BE

Key dates

Filing date	Apr 28, 2011
Grant date	Dec 25, 2012
Priority date	—
Expiry date	Aug 12, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH10D62/121
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

The present disclosure is related to a method for forming a catalyst nanoparticle on a metal surface, the nanoparticle being suitable for growing a single nanostructure, in particular a carbon nanotube, the method comprising at least the steps of: providing a substrate, having a metal layer on at least a portion of the substrate surface, depositing a sacrificial layer at least on the metal layer, producing a small hole in the sacrificial layer, thereby exposing the metal layer, providing a single catalyst nanoparticle into the hole, removing the sacrificial layer. The disclosure is further related to growing a carbon nanotube from the catalyst nanoparticle.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.