Inspection apparatus for sensor element, and method for inspecting electrical characteristics of sensor element
US8342002B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 10, 2011 |
| Grant date | Jan 1, 2013 |
| Priority date | — |
| Expiry date | Mar 26, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4175
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus including a cylindrical chamber having an opening part and a bottomed end part. The chamber includes an element insertion/extraction part, a tapered part, and a gas introduction part. The element insertion/extraction part is a tubular space continuous from the opening part. The tapered part is connected to the element insertion/extraction part, and is a space having a tapered shape in a cross-sectional view sectioned perpendicularly so that a lengthwise direction is larger toward the inner side. The gas introduction part is a tubular space continuously extending from the tapered part to a bottom portion. A sensor element is inserted into the chamber such that a front end thereof reaches the tapered part while a gap is formed between the sensor element and the chamber, and in this condition, an inspection gas is supplied to the chamber through a supply port provided in the gas introduction part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.