Micromechanical rotational speed sensor

US8342022B2 · kind B2 · utility

Assignee

• Conti Temic microelectronic GmbH · DE

Inventors

• Bernhard Schmid · Friedberg, DE
• Stefan Guenthner · Frankfurt, DE

Key dates

• Filing date: Mar 12, 2007
• Grant date: Jan 1, 2013
• Expiry date: Jan 12, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical rotational rate sensor includes a substrate, at least one base element suspended by at least one spring element on the substrate, an excitation device and a read-out arrangement. The base element includes at least one seismic or inertial mass. The spring element is movable perpendicularly to the motion direction of the base element so that apex or deflection points of the spring element will move perpendicularly to the excitation direction while the base element is thereby not excited to move perpendicularly to the excitation direction.