Method and system for fabricating a cavity in a substrate of a magnetic recording head
US8343363B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2010 |
| Grant date | Jan 1, 2013 |
| Priority date | — |
| Expiry date | Dec 2, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/102
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for fabricating an air-bearing surface (ABS) in a substrate having a surface is described. The substrate is for a magnetic recording head. The method includes providing a mask on the surface of substrate. The mask has an edge adjacent to a portion of the substrate exposed by the mask. The method also includes forming a taper in the portion of the substrate adjacent to the edge. The taper has an angle from the surface of the substrate of at least thirty degrees and not more than seventy degrees. The method also includes performing a reactive ion etching (RIE) to remove the portion of the substrate to form a cavity in the substrate. The angle of the taper is configured to substantially eliminated redeposition from the RIE on the edge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.