Double hard-mask mill back method of fabricating a near field transducer for energy assisted magnetic recording
US8343364B1 · kind B1 · utility
175Cited by
57References
27Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 8, 2010 |
| Grant date | Jan 1, 2013 |
| Priority date | — |
| Expiry date | Aug 2, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49032
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of forming a near field transducer (NFT) for energy assisted magnetic recording is disclosed. A structure comprising an NFT metal layer and a first hardmask layer over the NFT metal layer is provided A first patterned hardmask is formed from the first hardmask layer, the first patterned hardmask disposed over a disk section and a pin section of the NFT to be formed. An etch process is performed on the NFT metal layer via the first patterned hardmask, the etch process forming the NFT having the disk section and the pin section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.