Microdevices for chemical sensing and chemical actuation
US8343755B2 · kind B2 · utility
1Cited by
42References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 1, 2006 |
| Grant date | Jan 1, 2013 |
| Priority date | — |
| Expiry date | May 31, 2028 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/0084
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The invention relates to sensors for detecting chemical and biological material and for chemical actuation. In particular, the sensors of the present invention incorporates membranes or beams that are deformable in the presence of chemical adsorption on its surface. The sensor of the present invention contains a polymeric membrane or beam (102) that is clamped at least at two opposing ends (104) and (106).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.